Want SIO2 or ALO2 on top of your low temp polymer?
Our Low Temp ALD is your answer. We offer faster through put with a Low Temp Batch system for up to 300mm wafers.
* Batch system for up to 10 wafers with quartz carrier
* 300mm capable
* Turbo pump w/ bypass
* Heated N2 carrier gas
* 350C heated / water-cooled chamber (water-cooled with bypass valve for both Hot wall and Cold wall processing and faster cool down times for low temp process.)