High Temp CVD Systems

Our High Temp CVD systems all have a custom water-cooled PBN cup heaters for up to 1500 Deg C sample temperatures. Our standard system comes with everything you need to grow any CVD film.

Standard Configuration:
* Con-flat flanges
* Automated Load Lock
* Turbo pump (1 x 10-10)
* Throttle valve / Pressure control
* 5 gas MFC input + 1 N2 purge / vent
* Computer controlled
* Water cooled chamber
* Single wafer sample holder / susceptor

Optional items
* Custom Sample holders
* Additional gas inputs
* Auto bake out
* Process development assistance available on request.
* Differently pumped RGA's
* REED
* Raman spectroscopy
* Remote Plasma
* Cluster system for multiple process in-situe