RPCVD
RPCVD
Remote Plasma CVD
100 W RF power supply and auto matching network power a custom Remote Plasma source for a "low temp (~240C) Amorphous Silicon" Doped or Un-doped.
Remote Plasma CVD
100 W RF power supply and auto matching network power a custom Remote Plasma source for a "low temp (~240C) Amorphous Silicon" Doped or Un-doped.