System Upgrades

UHPLab offers system upgrades for your process

Project goal: Grow an amorphous Aluminum Nitride film

Univex 450B heated stage and sample location would not work for an amorphous Al Nitride film.
* factory heater would only reach 250C, this needed to be upgraded to reach 600C
* sample needed to be rotated directly under sputterer gun, the factory sample holder rotated under all 4 guns

UHPVP and Mattord Industries designed and built a custom water-cooled heated station that rotated directly under the Al sputter Target and reached 600 deg C. We met the customer's process goals under budget and on time, working directly with the vendor to change PLC perimeters. We specialize in custom heated stages for all types of systems and understand how to achieve your process needs.